Abstract
Both machining accuracy and assembly accuracy influence the total performance of analysis equipment developments that include curved surface optical reflectors. Synthesis of the form error that produced in actual machining, an assembly error, and an alignment error, etc. defines the final evaluation of its development. The simulation of a ray tracing method is applied to the development that has been mainly performed with empirical knowledge. As a result, the contents of a demand to the production accuracy become clear by this application.