Ultraprecision Cutting of Microlens-array Molding Die(2nd Report)

Abstract

The purpose of this paper is to investigate the cutting performance of molding dies for the spherical microlens-array, using ultra-precision cutting system with inclined axis cutting process. In this cutting process, a simultaneous 5-axes controlled cutting machine by the full aero-static guided with a mono-crystal diamond ballendmill of about 0.5mm nose radius was used. For experiments, workpieces of oxygen-free copper was applied. In the experiments, the form accuracy of about 250nmP-V and surface roughness of less than about 25nmP-V were obtained. The form accuracy was improved by about 150nmP-V from about 250nmP-V was form compensation program applied. As a result, it was confirmed that the inclined cutting process with compensation program should be effective to produce the cutting of molding dies for the microlens-array. Moreover, the compensation program of form accuracy due to the tool radius error was discussed.