Trial Production of Spiral Microcoil by 3D-LIGA Process

Abstract

LIGA process has been developed in the 2.5-dimensional world. We are introducing technologies of 3D X-ray lithography, worm injection molding with unscrewing demolding mechanism, and succeeded in the deployment to three dimensions of LIGA process. Furthermore, it succeeded in the trial production of a spiral microcoil using 3D-LIGA process and metalization technique combined flat and smooth electroplating with a leveling agent and isotropic chemistry etching. A diameter of this microcoil was 0.5 mm and the length was 1 mm. The width of coil line was 10 um, and pitches was 20 um. Also performing performance estimation as an inductor, inductance was 91nH at frequency of 1 GHz.