Fabrication of diffraction grating for X-ray Talbot interferometer

Abstract

Imaging technology using the phase data attracts attention from many researchers as the observation technique of a biomechanical material. We produced a diffraction grating for obtaining high-resolution phase data. We designed the new process flow and developed the fabrication technique composed MEMS technology, X-ray lithography, and micro electro plating. The X-ray lithography process was performed using the NewSUBARU synchrotron radiation facility. The line and the aspect ratio of this grating were 4 µm and above 5, respectively. We evaluated the diffraction grating in SPring-8.