Fine processing technology over the theoretical spatial resolution with high photon laser ablation

Abstract

We study on the fine laser ablation technology that surpasses the theoretical spatial resolution. We focused attention on the ionized-processing using high photon energy. This ionized laser ablation technology dissociates a nucleus directly from interatomic bond. So we used the ArF excimer laser (Wavelength: 193nm) This laser has enough photon energy to cleave an interatomic bond. We sort out a sufficient energy density of laser selectively to do ionized-processing because there is a characteristic of Gaussian distribution in the pencil of laser. In this way, we′ve verified the melting-less laser ablation. We can conduct the process surpassing theoretical spatial resolution by using near-field light with optic fiber.