Proceedings of JSPE Semestrial Meeting
2006 JSPE Spring Meeting
Session ID : F47
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Host: The Japan Society for Precision Engineering

Study of surface smoothing process in EEM
*Hidekazu Mimura, Akihisa Kubota, Akari Omichi, Kazuto Yamauchi, Yuzo Mori
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Keywords: EEM, ultraprecision machining, silicon, smoothing
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[in Japanese]
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© 2006 The Japan Society for Precision Engineering
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