Characterization of flexible radio-frequency spiral inductors on a plastic substrate

Guoxuan Qin; Hao Liu; Yanmeng Xu; Mengjiao Dang; Jianguo Ma; Zhenqiang Ma; Xuejiao Chen; Tao Luo

doi:10.1587/elex.13.20160690

This article has now been updated. Please use the final version.

Characterization of flexible radio-frequency spiral inductors on a plastic substrate

Guoxuan Qin, Hao Liu, Yanmeng Xu, Mengjiao Dang, Jianguo Ma, Zhenqiang Ma, Xuejiao Chen, Tao Luo

Author information

Guoxuan Qin
School of Electronic Information Engineering, Tianjin University
Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, Tianjin University
Hao Liu
School of Electronic Information Engineering, Tianjin University
Yanmeng Xu
School of Electronic Information Engineering, Tianjin University
Mengjiao Dang
School of Electronic Information Engineering, Tianjin University
Jianguo Ma
School of Electronic Information Engineering, Tianjin University
Zhenqiang Ma
Department of Electrical and Computer Engineering, University of Wisconsin, Madison
Xuejiao Chen
The State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University
Tao Luo
Tianjin Key Laboratory of Cognitive Computing and Application, School of Computer Science and Technology, Tianjin University

Keywords: characterization, flexible, plastic substrate, quality factor, self-resonant frequency, spiral inductor

JOURNAL FREE ACCESS Advance online publication

Article ID: 13.20160690

DOI https://doi.org/10.1587/elex.13.20160690

The final version of this article is now available: Vol. 13 (2016), No. 20 pp. 20160690-20160690

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Abstract

This paper describes the design and fabrication of flexible radio-frequency inductors integrated on a polyethylene terephthalate substrate. Experimental and modeling results for the RF responses of flexible inductors are reported. Investigations and analysis have been conducted on the effects of layout and process parameters on the frequency responses of inductance, quality factor and self-resonant frequency of the spiral inductors. The influence of bending strain on the performance of spiral inductors is also investigated based on measurement and modeling results. The analysis provides guidelines for designing the flexible spiral inductors towards the flexible monolithic microwave integrated circuits on a plastic substrate.

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