Abstract
PZT ceramics are widely used, however, they have hysteresis and non–linear problems. On the contrary, LiNbO3 piezoelectric single crystal is expected to have a superior linearity and no hysteresis. By optimizing the cutting angle (36°Y–cut), the thickness piezoelectric constant becomes maximum to 38pC/N. Moreover, multilayered structure enables piezoelectric displacement larger and the effective piezoelectric coefficient becomes equal to PZT. To realize the ultra–high precise positioning system, the multilayered LiNbO3 actuator was fabricated and the piezoelectric vibration characteristic and linearity were examined.
