Abstract
SIDM which has been developed in Konica Minolta put in practical use as the actuator for canceling camera–shake in digital camera and auto–focus in cellar–phone camera. But these aplications are using coarse driving (positioning by sawtooth displacement) of SIDM. The stage for positioning using coarse driving and fine driving (positioning by piezo displacement itself) of SIDM was developed with NanoControl, and it is reported.