Abstract
The drive characteristic of a precision processing table of having two drive units which perform flexible movement of clamp of a rail and the advance direction with a piezo–electric element was examined. The influence of the feedback control drive and stick slip by laser sensor or the Electrostatic capacity sensor was measured, and the drive characteristic of a low–speed very small drive was examined very much. The perpendicular load of 211N was applied, feedback by laser sensor was performed, and the drive by the resolution of sensor was completed. Moreover, the stick slip was measured and it has checked that it was about 5nm.
