2006 JSPE Spring Meeting
Session ID : K77
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Host: The Japan Society for Precision Engineering
Design and Control of Nano–motion Actuator for Working Distance of 30μm
*Masato Furuya, Yotsugi Shibuya, Shigeki Mori, Akihiro Naganawa, Tomoyoshi Fujiya, Goro Obinata, Kazuhiro Ouchi
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