A Study on Traceable Measurement Standards for Areal Surface Texture Measuring Instruments

Abstract

As to surface texture measurement, measurement trend has shifted to 3D areal measurement from 2D profile measurement. However, there is a problem that is equivalence of the data among the instruments which have different measurement principles. In this study, the objective is to manufacture the material measure as random surface texture standard. The material measure could be measured by variety of instruments (ex. optical sensor, stylus and interferometer), and then traceable measurement is also possible. The material measure is designed using a software gauge based on non-causal 2D autoregressive model (2D A-R model) and manufactured using a super 5-axies nano machine with a micro ball-end mill. Additionally, a method of evaluating comprehensive performance is reported.