精密工学会学術講演会講演論文集
2008年度精密工学会秋季大会
セッションID: F20
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YAGセラミックスのELID研削研究
*GUO JIANQIANG大森 整片平 和俊成瀬 哲也大石 裕緑川 克美平等 拓範
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YAG ceramic is considered as the new generation of the high out-put laser material due to its excellent energy. The YAG ceramic chip using for the laser instrument must be fabricated with the very low surface roughness. In this experiment, ELID grinding on the YAG ceramic chip was carried out. Various experimental conditions were investigated in order to get the ground surface with very low roughness. Through the experiment, the ductile ground surface was obtained. The experimental conditions and the results were introduced in this paper.

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