Proceedings of JSPE Semestrial Meeting
2009 JSPE Autumn Conference
Session ID : C13
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Host: The Japan Society for Precision Engineering

Improvement of thickness uniformity of SOI layer by numerically controlled local wet etching (2nd report)
*Kazuaki Ueda, Mao Hosoda, Mikinori Nagano, Nobuyuki Zettsu, Kazuya Yamamura
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Keywords: Etching, SOI, Silicon, Substrate, MEMS
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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