2009 JSPE Autumn Conference
Session ID : C14
Conference information
Host: The Japan Society for Precision Engineering
Uniformalization of the AT cut quartz crystal wafer thickness by open-air type plasma chemical vaporization machining
*Masaki Ueda, Tatsuya Takiguchi, Yasushi Oshikane, Masafumi Shibahara, Kazuya Yamamura
Author information
Keywords:
plasma CVM,
quarts crystal wafer,
AT cut,
pulse modulated plasma,
emission spectrochemical analysis
Details
