2009 JSPE Autumn Conference
Session ID : G04
Conference information
Host: The Japan Society for Precision Engineering
Aspherical Surface Figure Measurement by PS/PDI with Two Optical Fibers
Application for plane mirror
*Kazuaki Udaka, Toshiaki Matsuura, Yasushi Oshikane, Haruyuki Inoue, Motohiro Nakano, Toshihiko Kataoka, Kazuto Yamauchi
Author information
Keywords:
surface figure measurement,
point diffraction interferometer,
phase shifting method,
optical fiber,
plane mirror
Details
