Abstract
Gaussian Filter (GF) to extract the roughness profile from a primary profile suffers strongly from the outliers mingled in the data. To solve this problem, several researches to put this method robust GF has been proposed, but the calculation cost becomes large due to the large number of repetitive applications. In this research, we propose a new robust and fast method by using the fast M-Estimation method. Since the proposed method requires just a few times of repetitive applications of the rectangular smoothing filter, the computation cost could be drastically reduced. Moreover, there are no outliers in the data, the proposed method could provide completely the same result of the original GF method.