Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : K34
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Host: The Japan Society for Precision Engineering

Aspherical Surface Figure Measurement by PS/PDI with Two Optical Fibers
Surface figure measurement of parabolic mirror
*Toshiaki Matsuura, Kazuaki Udaka, Yasushi Oshikane, Haruyuki Inoue, Motohiro Nakano, Toshihiko Kataoka, Yasuo Higashi
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Keywords: surface figure measurement, point diffraction interferometer, phase shifting method, optical fiber, parabolic surface
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Abstract
A phase-shifting point diffraction interferometer (PS/PDI) with two optical fibers has been developed for absolute surface figure measurement of large aperture optics. Diffracted spherical wave from point light source is used for standard surface in a PS/PDI. A PS/PDI is appropriate for surface figure measurement of concave mirror. Absolute aspherical mirror measurement is needed. Surface figure measurement of parabolic mirror has been studied as aspherical measurement.
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© 2009 The Japan Society for Precision Engineering
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