Multi-Wavelength Single-Shot Interferometry by Global Model Fitting

Abstract

As a single-shot interferometric technique, spatial carrier interferometry is well investigated. However it has some problems like low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique which does not need carrier introduction. It is based on a model fitting algorithm, and estimates the model parameters and the heights of plural points simultaneously from their multi-wavelength intensity data. The validity of the proposed method is proved by computer simulations and preliminary experiments.