Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn Conference
Session ID : L33
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Host: The Japan Society for Precision Engineering

3-D measurement for micro structure using SEM
*Sho Kanameishi, Takuya Kayamoto, Yoshimasa Nakajima, Yasuhiko Arai, Shunsuke Yokozeki
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Keywords: Scanning Electron Microscope, Moiré Topography, Three Dimensional Shape Measurement
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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