Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : F37
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Host: The Japan Society for Precision Engineering

Study on evaluation method for surface topography of CMP polishing pad based on optical Fourier transform
*Takashi Kushida, Keiichi Kimura, Panart Khajornrungruang, Keisuke Suzuki
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Keywords: Chemical Mechanical Polishing, Polishing Pad, Diffraction, Scattering, Laser, Topography
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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