Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : F38
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Host: The Japan Society for Precision Engineering

Identification of nonlinear viscoelasticity of polishing pad using a compression tester
Norikazu Suzuki, *Masakazu Asaba, Yohei Hashimoto, Eiji Shamoto
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Keywords: Chemical Mechanical Polishing, Polishing pad, Viscoelasticity, Nonlinear elasticity
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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