Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : F45
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Host: The Japan Society for Precision Engineering

Effect of chemical action and mechanical action in polishing (4)
*Makoto Sato, Maiko Takahashi, Wataru Ohmori
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Keywords: polishing, FT-IR, XPS, ceria, titania, zirconia
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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