2011 JSPE Autumn Conference
Session ID : F69
Conference information
Host: The Japan Society for Precision Engineering
Development of a Nondeforming Freezing Pin Chuck (5th Report)
Temperature distribution analysis of a chuck system and congealing deformation
*Katsunori Takehana, Atsunobu Une, Nagahisa Ogasawara, Kenichiro Yoshitomi, Masaaki Mochida
Author information
Keywords:
nondeforming freezing pin chuck,
nondeforming fixing,
congealing,
freezing liquid,
shear peeling strength,
pin top roughness
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