2011 JSPE Autumn Conference
Session ID : H46
Conference information
Host: The Japan Society for Precision Engineering
Development of High-Quality and High-Throughput Micro-Hole Processing Using Hollow Microneedle Array (3rd Report)
Evaluation of Through-Hole Formation Process in Polymer Films
*Jumpei Yoshida, Moeto Nagai, Takahiro Kawashima, Takayuki Shibata, Toshio Kubota, Mamoru Mita
Author information
Keywords:
Micro-hole processing,
Thermal imprinting process,
Polymer through holes,
Hollow microneedle array,
MEMS
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