Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : H61
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Host: The Japan Society for Precision Engineering

Generation of Regular Micro Texture Surface Using Anisotropic Etching
*Kengo Ichihashi, Akira Kakuta
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Keywords: wet etching, single crystal Si, SiO2, Si3N4, micro texture
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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