Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : H66
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Host: The Japan Society for Precision Engineering

Fabrication of micro mechanical structure using self-assembled particles
*Kensaku Yoshino, Arata Kaneko, Yasuhiro Tanaka
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Keywords: Micro-cantilever, Particle, Self-assembly, Sensor
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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