Composition exploration of Zr-Ni-Al metallic glass thin film using combinatorial sputtering method

Abstract

Zr based bulk metallic glass alloy has promising mechanical properties for MEMS applications although it has received little attention as a micro-material. We have tried to explore an optimum composition of ZrNiAl alloy film for stable amorphous phase using the combinatorial sputtering method. Crystallization temperature evaluation of the sample libraries depoited by triple source sputtering showed that the alloy films having a composition of around Zr40Ni30Al30 were very stable amorphous material of which crystallization temperature were higher than 550C.