Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : J31
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Host: The Japan Society for Precision Engineering

Strain analysis of thin films using FEM
*Hidetsugu Ozaki, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
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Keywords: Finite Element Method, Thin Films, Strain
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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