Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : J32
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Host: The Japan Society for Precision Engineering

Development of sputtering conditions for PZT actuator with high piezoelectric property by Au-Pt buffer layer
*Rikiya Takita, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
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Keywords: PZT, Piezo actuator, ECR sputtering, Buffer layer
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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