2011 JSPE Autumn Conference
Session ID : M14
Conference information
Host: The Japan Society for Precision Engineering
Superfinishing ability of single crystal silicon with mechanochemical superabrasive stone containing BaSO4 abrasive
*Daishu Araki, Naomichi Furushiro, Tomomi Yamaguchi, Noboru Matsumori, Hidekazu Ogura
Author information
Keywords:
Superfinishing,
Single crystal silicon,
Mechanochemical superabrasive stone,
Barium sulfate,
Wear resistance
Details
