Proceedings of JSPE Semestrial Meeting
2011 JSPE Autumn Conference
Session ID : M67
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Host: The Japan Society for Precision Engineering

Precise profilometry using an interferometric microscope with a vertical-cavity-surface-emitting-laser diode
*Seiichi Kakuma, Yasuhiko Katase
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Keywords: Vertical cavity surface emitting laser diode, Interferometric microscopy, Wavelength scanning
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Abstract
[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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