Development of a Surface Profiler Base on Three-Wavelength Phase-Shifting Interferometry

Abstract

To overcome the phase ambiguity problem in phase-shifting interferometry, multi-wavelength interferometry has been long investigated. However, its industrial application has been limited because of its complex optical configurations. This paper introduces a surface profiler which uses a low-cost and simple three-wavelength imaging system consisting of a white-light illuminator, a multi-bandpass filter and a color CCD camera. The algorithms used and experimental results are presented.