Abstract
In this paper, a new fabrication process of an ordered nano-dot array, i.e., a combination of Nano Plastic Forming and annealing processes, is proposed. Experiments were conducted to confirm its feasibility of the process and effect of process condition on nano-dot array. First, a quartz glass substrate was coated with a thin layer of gold. Then, lattice grooves were fabricated on the gold layer by means of the Nano Plastic Forming process, where various pitch settings of the grooves were examined. Finally, the substrate is annealed at 700 -C for 10 minutes to induce self-organization. As a result, a nano-dot array, where dot size was down to 40 nm and pitch was 100 nm, was successfully fabricated on the surface of quartz glass.
