Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : N45
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Hiroki Ashiba, Reo Kometani, Shin-ichi Warisawa, Sunao Ishihara
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Keywords: NEMS/MEMS, stressed nano resonator, stiction, FIB-CVD
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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