Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : B70
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Development of laser machinable glass by field-assisted ion-exchange method
*Yuki MatsuuraTakehiro WatanabeHirofumi HidaiSouta Matsusaka
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Keywords: Laser processing, glass
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Abstract
Laser machining is suitable for a micro processing. But nanosecond pulsed laser beam has not been suitable for micro processing of glass due to clack formation. Borosilicate glasses introduced silver or copper were reduced in transmittance of ultraviolet wavelengths. Also these glasses were shown that clack formation and processing thresholds was decreased with laser beam which is 6 nanosecond of pulse duration and 266 nm of wavelength. And these glasses were shown that a glass introduced the copper was more decrease in transmittance of ultraviolet and processing thresholds than a glass introduced silver. Workability of borosilicate glass introduced copper was not lightly affected by energy density and annealing.
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© 2011 The Japan Society for Precision Engineering
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