Abstract
In the polishing process, the conditioning processing is widely used for regeneration of pad surface texture. Nowadays, the performance evaluation of conditioner is demanded on user's experience, and it is important to develop the new technique for quantitatively evaluation. With above backgrounds, we propose the non-contact measurement evaluation using digital image correlation (DIC) method from a viewpoint of the micro deformation of pad surface texture by the conditioning processing. In this paper, we discuss two experiments; (1) the accuracy evaluation for pad surface displacement, and (2) the micro deformation distribution characteristics of pad surface texture. As the result, we found the following two points. (1) The DIC can measure the micro deformation distribution characteristics of pad surface texture quantitatively. (2) There are remarkably relationships between the micro deformation characteristics of pad surface texture and conditioning conditions such as conditioning time, mesh size of conditioner grains.
