Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : E07
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Numerical discussion of polishing mechanism considering contact area of polishing pad and that of polishing abrasives
*Akira IsobeShinichi HabaHideaki Nishizawa
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Keywords: Polishing, Polishing, Slurry
CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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