Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : A69
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Host: The Japan Society for Precision Engineering

Synthesis of hard carbon films by hot filament assisted nano-pulse plasma CVD
Kiyonari Nagashima, *Kei Saito, Yoshihiko Mochiduki, Naoto Ohtake
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Keywords: Nano-pulse, Hot filament, CVD, Carbon film, Diamond, DLC
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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