Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : A73
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Host: The Japan Society for Precision Engineering

Crystal growth calculation that considers lattice strain of piezoelectric thin film that buffer layer causes
*Yoshiki Nakada, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
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Keywords: Piezoelectric thin film, Buffer layer, Lattice strain, Crystalline growth
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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