Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : A75
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Host: The Japan Society for Precision Engineering

Improvement in properties of TiNi thin films by adding a Buffer layer
*Hidetsugu Ozaki, Kazuyoshi Tsuchiya
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Keywords: TiNi shape memory alloy, ECR sputtering, Buffer layer, Lattice mismatch rate
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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