2011 JSPE Spring Conference
Session ID : K03
Conference information
Host: The Japan Society for Precision Engineering
Profile measurement of a spherical mirror by a new high-speed nano-profiler using normal vector tracing method
*Daisuke Tonaru, Hiroki Matsumura, Takao Kitayama, Jun-ichi Uchikoshi, Yasuo Higashi, Katsuyoshi Endo
Author information
Keywords:
profile measurement,
figure error,
aspheric mirror,
normal vector,
five simultaneous axis controls,
high accuracy mirror
Details
