Nanometer Profile Measurement on Large Aspheric Optical Surface (4th report)

Numerical Simulation and Experiment for Measuring of Large Surface with Scanning Deflectometry Method

Abstract

High accuracy mirrors and lenses with large dimension are widely used in the huge telescopes and other industry filed. However, commercial profile measuring machines faces problems when measuring aspheric surface with large slope. We have proposed a new method to measure large aspheric optical surface with scanning deflectometry method and rotatable optical devices in last report. In this report, error parameters by the rotation of rotatable mirror are considered into the error analysis. Numerical simulation is done to verify the theoretical error analysis. And experiment is done to measure a large spherical surface with a diameter of 200 mm.