Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : K09
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Host: The Japan Society for Precision Engineering

Development of multi-cantilever using MEMS technology for scanning profile measurement with multi-point method.
Influence of misalignment of sensors and basic design of the multi-cantilever.
*Takahiro Akiyoshi, Hiroki Shimizu, Yuuma Tamaru
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Keywords: scanning profile measurement, multi-probe method, three-point method, motion error, multi-cantilever, micro electro mechanical systems
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Abstract
[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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