Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : K13
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Development of laser trapping probe for the nano-CMM(Coordinate Measuring Machine)(6th report)
Improvement for the unstable behavior of the probe sphere
*Mitsutoshi KobayashiMasaki MichihataTerutake HayashiYasuhiro Takaya
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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