Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : K36
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Host: The Japan Society for Precision Engineering

Thin-Film Thickness Evaluation for Nano-Imprint by using Near-Field Optics(8th Report)
Experimental Verification of Near-Field Optics Property
*Yuuichi Ikeda, Satoru Takahashi, kiyoshi Takamasu
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Keywords: Near-Field Optics, Nano-Imprint, shear-force, thin-film thickness evaluation
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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