Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : K37
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Host: The Japan Society for Precision Engineering

Precision Displacement Detecting Method of Micro Touch Probe Ball using the Astigmatism Method
Analysis and basic experiment of spot shape change by displacing probe ball
*Atsuo Ogawa, Hiroki Shimizu, Yuma Tamaru
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Keywords: Micro Touch Probe, Astigmatism Method, CMM, Precision Displacement Detection
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Abstract
[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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