Fabrication of a blazed grating using a ultrahigh precision machine tool with burnishing method

Abstract

This study describes a fabrication of blazed gratings using a 5 axis ultrahigh precision machine tool with burnishing method. Recently microgrooves on free curve surface were fabricated by 5 axis ultrahigh precision machine tool. Although ultraprecision cutting method produces burrs which decrease diffraction efficiency and resolution of the grating. Burnishing method makes fewer burrs and can improve surface accuracy. This paper reports the result of fabrication experiments of blazed gratings using a 5 axis ultrahigh precision machine tool and single crystalline diamond burnishing tool. Comparing with cutting,the surface roughness of grating grooves fabricated by burnishing was improved.