Abstract
When the shape-memory treatment is administered to the TiNi thin film as the actuator for MEMS, the possibility that the wrinkle and the damage such as break are caused in the thin film is thought in the transformation that uses the external force. In the former report, the transformation when the inside residual stress of the thin film was opened was controlled, and it proposed the technique for transforming it into the aimed shape. However, because the transformed condition of the thin film is different depending on the angle of the residual stress, an appropriate actuator designing is needed. Then, an appropriate designing factor is selected by a statistics analysis.
