Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : L13
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Host: The Japan Society for Precision Engineering

A novel fabrication process for making tensile strained resonators
*Kohei Kuroda, Reo Kometani, Shinichi Warisawa, Sunao Ishihara
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Keywords: resonator, lithography, NEMS, MEMS
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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